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Semiconductors

Enhance Process Yield with Comprehensive Solutions for Advanced Semiconductor Manufacturing

In semiconductor manufacturing, microcontamination can significantly impact process yield. Circul-Aire offers a complete range of solutions tailored for cleanroom environments and AMC (Airborne Molecular Contaminant) control systems—ensuring cleanroom conditions meet ISO Class 1 for particles and sub-ppb levels for AMC.

AMC Filtration: Essential for Cleanroom Manufacturing Success

Airborne molecular contamination (AMC) poses unique challenges in semiconductor processes due to its potential to cause defects. Acids, bases, organics, refractories, and dopants can react with wafer surfaces and optical components, reducing efficiency and yield.

As semiconductor specifications become stricter and device dimensions shrink, contamination control systems must meet these heightened demands. With wafers undergoing hundreds of intricate processes over weeks in production, even the smallest contamination can affect the entire process chain, impacting output and profitability.

The trend toward larger wafer sizes also drives the need for advanced AMC filtration, as the cost of a single wafer increases. Further, emerging technologies such as EUV and multi-patterning DUV lithography require defect-free masks, adding pressure on cleanroom systems for tools, inspection equipment, and mask storage.

Protecting Your Equipment and Process Integrity

Circul-Aire solutions deliver proven protection for semiconductor manufacturing, from lithography and etching to diffusion, thin films, ion implantation, inspection tools, and wafer storage.

Our offerings include:

  • Process Tool Air Filters: Designed for optimal tool-level protection.
  • Cleanroom Air Filters: Effective AMC filtration for cleanroom environments.
  • Scanner Pre-Filtration Systems: Specialized filtration for advanced lithography.
  • Energy-Efficient, Low-Outgassing Solutions: Optimized for facility systems.

Advanced Features for Semiconductor Applications

  • Low-Outgassing AMC Filters: Developed to release minimal organic contaminants.
  • Dust Collectors and Gas Scrubbers: Maintain cleaner exhaust air and protect the environment from process emissions.

Circul-Aire offers a diverse range of air filtration products tailored to the unique needs of data centers, ensuring maximum uptime, efficiency, and protection for your operations.

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